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2 years, 3 months ago

I'm investigating reflectrometry thin film measurement. require help with spectrometer FFT analysis formulae

I'm investigating reflectrometry thin film measurement.
I understand basic principles relating thin film thickness wave length and refractive index.
When have unknown thickness use of white light illumination and spectrometer
Literature talks about use of FFT to produce histogram of probable thickness based on the diffraction pattern
Can anyone point me at the literature to review the formulae
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steeltahn | 2 years, 3 months ago
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The Michelson spectrograph is similar to the instrument used in the Michelson-Morley experiment. Light from the source is split into two beams by a half-silvered mirror, one is reflected off a fixed mirror and one off a moving mirror which introduces a time delay -- the Fourier transform spectrometer is just a Michelson interferometer with a movable mirror. The beams interfere, allowing the temporal coherence of the light to be measured at each different time delay setting, effectively converting the time domain into a spatial coordinate. By making measurements of the signal at many discrete positions of the moving mirror, the spectrum can be reconstructed using a Fourier transform of the temporal coherence of the light. Michelson spectrographs are capable of very high spectral resolution observations of very bright sources. The Michelson or Fourier transform spectrograph was popular for infra-red applications at a time when infra-red astronomy only had single pixel detectors. Imaging Michelson spectrometers are a possibility, but in general have been supplanted by imaging Fabry-Perot instruments which are easier to construct.

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nigelhales | 2 years, 2 months ago Report

Sorry for the delayed reply. Thanks for the help. Currently following up.

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justin_time | 2 years, 3 months ago
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Here's a link to a document that discusses such things, specifically if you don't know the optical properties of the substrate.

Below is another document that talks about using an FT to do the same thing. You can probably adapt it to a FFT and do the same thing.

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nigelhales | 2 years, 3 months ago Report

Thanks for the help and quick response.
I've seen the first article but not the second.
Will review asap.

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